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Wafer Sorters
As one of the players with highest installed base, our wafer handling and sorting equipments have been widely used in the automated production environment.
A well-integrated sorting tools would help minimise human involvement which would reduce any incurring errors and contamination.
The sorters can be designed to handle wafer horizontally, for a high throughput handling or vertically, which is usually used for batch transfer.
Sorter has been widely used for wafer ID reading. However, different functions have been incorporated to cater the needs of different functional groups in the FAB. It includes spliting the lot, merging the lot, compressing the lot, or creating the individual wafer mix or even flipping the wafer over while tranfering. Configuration of system is flexible enough for different groups. It could be configured as 4 carriers sorter or 2 carriers sorter or even 1 carrier sorter. As the wafer is getting thinner, having sorter to handle thin wafer becomes critical.
Small footprint design has been reflected in all our sorters. SECS/GEMS interface has been incorporated into the system for automation purposes.
Option to handler wafer size from 150mm,200mm and 300mm.
A well-integrated sorting tools would help minimise human involvement which would reduce any incurring errors and contamination.
The sorters can be designed to handle wafer horizontally, for a high throughput handling or vertically, which is usually used for batch transfer.
Sorter has been widely used for wafer ID reading. However, different functions have been incorporated to cater the needs of different functional groups in the FAB. It includes spliting the lot, merging the lot, compressing the lot, or creating the individual wafer mix or even flipping the wafer over while tranfering. Configuration of system is flexible enough for different groups. It could be configured as 4 carriers sorter or 2 carriers sorter or even 1 carrier sorter. As the wafer is getting thinner, having sorter to handle thin wafer becomes critical.
Small footprint design has been reflected in all our sorters. SECS/GEMS interface has been incorporated into the system for automation purposes.
Option to handler wafer size from 150mm,200mm and 300mm.