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Temperature Control Unit
This series of Temperature Control products is dedicated to providing controllable environmental temperature for the etching equipments and thin film deposition equipments. Its high-precision temperature controllable circulating mediator would maintain a stable and reliable temperature for the reaction chamber of the customer's etching equipment, or deposition tools.
The Chiller accuracy is +/-0.3C for the working temperate ranges from -20C - 80C or -35 - +40C or +20 - + 90C. It has been proven working with different brands of etching tools and deposition tools.
The Chiller accuracy is +/-0.3C for the working temperate ranges from -20C - 80C or -35 - +40C or +20 - + 90C. It has been proven working with different brands of etching tools and deposition tools.